100 micrometers flexible interdigitated gold electrodes ide pet gas sensor interdigital capacitor arrays wearable device chip (5mm-10mm

1. substrate: polyethylene terephthalate (pet). thickness of pet : 150um. overall size: 5mm*10mm. 2. conductor layer structure: cu/ni/au, whose thicknesses are 18um, 4um, 1um respectively. 3. line width: 100um; line space: 100um. number of interdigital pairs: 10 (20 fingers). finger length: 3.3mm.