100 microns interdigitated gold electrodes ide alumina ceramic gas sensor interdigital capacitor arrays dpc thin film (10mm-10mm)
Description
1. substrate: alumina ceramic. 2. overall size: 10mm*10mm. 3. line width: 100um; line space: 100um; finger length: 7700um; number of interdigitate pairs: 12 (24 fingers). 4. the metal layer structure: ti/cu/ni/au, whose thickness are 0.1um, 2um, 1um, 1um respectively. 5. the suitable temperature for using: from -50 degrees celsius to +300 degrees celsius.
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