10 micrometers interdigitated electrodes platinum ide quartz glass microelectrode mems medical optical chemical sensor biosensor chip (pt)
Description
1. the substrate: quartz glass. the size of the substrate is 5mm x 8mm x 0.52mm. 2. the conductor layer structure: ti/pt, the thickness are 30nm and 100nm respectively. 3. line space: 10um; line width: 10um; finger length: 2100um; number of interdigitate pairs: 75(150 fingers).
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