30 microns interdigitated electrodes ide monocrystalline silicon sputter gold mems medical chemical sensor biosensor (4mmx6mm)

1. the substrate: p-type monocrystalline silicon with 300nm thickness of sio2 on the surface of the silicon wafer. the size of the substrate is 6mm x 4mm x 0.52mm. the conductor layer structure: cr/au, the thickness are 10nm and 100nm respectively. 2. line width: 30um; line space: 30um; finger length: 1500um; number of interdigitate pairs : 20(40 fingers). 3. large pads, so bonding and soldering are easy. this product can be used as core part of biological, medical and optical sensors.