3 microns Interdigitated Gold Electrodes IDE Silicon Substrate MEMS Medical Chemical Sensor Biosensor Chip Customization

1. The substrate: P-type monocrystalline silicon with 300nm thickness of SiO2 on the surface of the silicon wafer. The size of the substrate is 6.5mm X 4mm X 0.52mm. The conductor layer structure: Ti/Au, the thickness are 30nm and 100nm respectively. 2. Line Width: 5um; Line Space: 3um; Finger Length: 1600um; Number of interdigitate pairs : 75(150 fingers). 3. Large pads, so operation is easy. This product can be used as core part of biological, medical and optical sensors.