20 microns Interdigitated Electrodes IDE Quartz Glass Gold Microelectrode MEMS Medical optical Chemical Sensor Biosensor Chip

1. The substrate: quartz glass. The size of the substrate is 5mm X 8mm X 0.7mm. 2. The conductor layer structure: Cr/Au, the thickness are 30nm and 100nm respectively. 3. Line Space: 20um; Line Width: 20um; Finger Length: 2100um; Number of interdigitate pairs: 50(100 fingers).