100um interdigitated gold electrodes ide alumina ceramic gas sensor interdigital capacitor arrays dpc thin film (10mm-20mm)
Description
1. substrate: alumina ceramic. 2. overall size: 10mm*20mm. 3. line width: 100um; line space: 100um; finger length: 6300um; number of interdigitate pairs: 20 (40 fingers). 4. the metal layer structure: ti/cu/ni/au, whose thickness are 0.1um, 5um, 4um, 1um respectively. 5. the suitable temperature for using: from -50 degrees celsius to +300 degrees celsius.
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