10 micrometers Interdigitated Electrodes Platinum IDE Quartz Glass Microelectrode MEMS Medical optical Chemical Sensor Biosensor Chip (Pt)

1. The substrate: quartz glass. The size of the substrate is 5mm X 8mm X 0.52mm. 2. The conductor layer structure: Ti/Pt, the thickness are 30nm and 100nm respectively. 3. Line Space: 10um; Line Width: 10um; Finger Length: 2100um; Number of interdigitate pairs: 75(150 fingers).