10 микрометров взаимодействующие электроды ide кремниевая подложка sputter gold mems медицинский химический сенсор биосенсор чип

1. the substrate: p-type monocrystalline silicon with 300nm thickness of sio2 on the surface of the silicon wafer. the size of the substrate is 6.5mm x 4mm x 0.52mm. the conductor layer structure: ti au, the thickness are 30nm and 100nm respectively. 2. line width: 10um; line space: 10um; finger length: 1600um; number of interdigitate pairs : 50(100 fingers). 3. large pads, so operation is easy. this product can be used as core part of biological, medical and optical sensors.